The study of hydrolysis kinetics for hexamethyldisilazane

PHYS 350

Liucheng Wang, wanglc@zzu.edu.cn, Hongqi Wu, wuhongqi1201@163.com, Lei Li, wanglc@zzu.edu.cn, Jianhong Zhao, and Chengying Song, wanglc@zzu.edu.cn. College of Chemical Engineering, Zhengzhou University, No.100 of Science Road, Zhengzhou, 450001, China
Abstract: Kinetics of hexamethyldisilazane(HMDS) hydrolysis were researched at various pH and temperatures using gas chromatogram. The PH rate profiles for hydrolysis of HMDS were obtained at 298K and the PH value ranged 7~13. The results showed that HMDS hydrolysis followed the first-order reaction law and the hydrolysis rate increase with the pH decrease. The hydrolysis rate increased with temperature between 278K and 308K and the activation energy of HMDS hydrolysis was 28.81 kJ•mol-1.