| INOR | Monday, August 20, 2007 | ||
1:30 PM-5:00 PM BCEC -- 213, Oral | |||
Thin Films: Chemical Vapor Deposition and Atomic Layer Deposition | |||
| Officials: | Gregory S. Girolami Wayne L. Gladfelter | ||
| 1:30 PM | 413 | Atomic layer deposition in nanotechnology applications Markku Leskela, Marianna Kemell, Markus Lautala, Tero Pilvi, Viljami Pore, Eero Santala, Mikko Ritala | |
| 2:00 PM | 414 | Advanced applications for low-temperature atomic layer deposition Gregory N. Parsons, Qing Peng, Jeong-Seok Na, G. Kevin Hyde, Xiaoyu Sun, Joseph C. Spagnola, S. Michael Stewart, Ryan M VanGundy, Jennifer A. Ayres, Kusum L. Chandra, Richard J. Spontak, Christopher B. Gorman | |
| 2:30 PM | 415 | Atomic layer deposition as a synthesis method for inorganic membranes William J. DeSisto | |
| 3:00 PM | Intermission | ||
| 3:30 PM | 416 | Molecular layer deposition of alucone and other hybrid organic/inorganic polymer films Steven M. George, Arrelaine A. Dameron, Stephen D. Davidson | |
| 4:00 PM | 417 | Preparation and characterization of porous SiCOH dielectrics Deborah A. Neumayer, S. M. Gates, M. H. Sherwood, A. Grill, X. Wang, M. Sankarapandian | |
| 4:30 PM | 418 | Chemical vapor deposition on aerosolized nanoparticles Jeffrey T. Roberts, Jason Holm, Yuanqing He | |
Previous Session -- Thin Films: Chemical Vapor Deposition and Atomic Layer Deposition -- Next Session
Symposium Grid -- Division of Inorganic Chemistry -- Session Listing
Symposium Grid -- Material Innovations -- Session Listing
The 234th ACS National Meeting, Boston, MA, August 19-23, 2007