| INOR | Monday, August 20, 2007 | ||
8:30 AM-12:10 PM BCEC -- 258C, Oral | |||
Thin Films: Chemical Vapor Deposition and Atomic Layer Deposition | |||
| Officials: | Gregory S. Girolami Wayne L. Gladfelter | ||
| 8:30 AM | Introductory Remarks | ||
| 8:40 AM | 348 | Design of precursors for CVD and ALD Roy G. Gordon | |
| 9:10 AM | 349 | Surface activation: True ALD of copper films? Jeffery S Thompson | |
| 9:40 AM | 350 | Molecular precursor routes to gallium oxide Claire J. Carmalt, Siama Basharat | |
| 10:10 AM | Intermission | ||
| 10:40 AM | 351 | Pyrazolate-based precursors for the growth of thin films by atomic layer deposition Charles H. Winter, Charles L. Dezelah IV, Monika K. Wiedmann, Mark J. Saly, Lauri Niinistö | |
| 11:10 AM | 352 | Deposition of thin films in supercritical carbon dioxide Theodosia Gougousi | |
| 11:40 AM | 353 | Combinatorial chemical vapor deposition and atomic layer deposition of mixed metal oxide films Wayne L. Gladfelter, Tyler L. Moersch, Bin Xia, David C. Boyd, Dan Yu, Stephen A. Campbell | |
Thin Films: Chemical Vapor Deposition and Atomic Layer Deposition -- Next Session
Symposium Grid -- Division of Inorganic Chemistry -- Session Listing
Symposium Grid -- Material Innovations -- Session Listing
The 234th ACS National Meeting, Boston, MA, August 19-23, 2007