Fabrication of novel molecularly imprinted alumina-silica using non-hydrolytic sol-gel method for trace phosphine detection

ANYL 456

Sue-min Chang1, Ching-jung Hou1, Shao-Yi Yen2, and Shou-Nan Li3. (1) Institute of Environmental Engineering, National Chiao Tung University, 75 Po-Ai Street, Hsinchu, Taiwan, (2) Center for Environmental, Safety and Health Technology Developmnt, Industrial Technology Research Institue, Rm. 1130, Bldg. 51, 195, Sec. 4,Chung Hsing Rd., Chutung, Hsinchu, Taiwan, (3) Center for Environmental, Safety and Health Rechnology Development, Industrial Technology Research Institute, Rm. 1130,Bldg. 51, 195, Sec. 4, Chung Hsing Rd., Chutung, Hsinchu, Taiwan
Novel alumina-silica gel imprinted with phosphine, a toxic gas used in semiconductor factory, was prepared via non-hydrolytic sol-gel process. The sensitivity and selectivity toward phosphine detection were also examined using FTIR. Aluminum chloride and 3-aminopropyltrioxysilane were used as functional monomers to selectively bind phosphine via P„_Al3+ chelating and hydrogen bonding, respectively. In addition, tetraethoxylsilane was used as cross-linker to polymerize the highly porous gel. Rebind experiment showed that the imprinted alumina-silica gels have high adsorption capacity for phosphine compared to the nonimprinted gels. In addition, a wide dynamic range of 2-3 orders of magnitude with the detection limit of 100-300 ppb was observed, which is lower than the detection limit of currently used color-tape methods. Results obtained clearly demonstrate that the modularly imprinted alumina-silica is advanced in selectively pre-concentration of phosphine. Also, the MIP-based IR system is promising for detection of trace phosphine in situ which is highly beneficial in micro-contamination control in semiconductor industry.
 

Analytical Approaches
1:30 PM-4:30 PM, Thursday, August 23, 2007 BCEC -- 104C, Oral

Division of Analytical Chemistry

The 234th ACS National Meeting, Boston, MA, August 19-23, 2007