Anti-adhesion surface treatments of molds for high resolution unconventional lithography and applications

PMSE 338

Mihee Kim,, Min Jung Lee, Joohee Kim, Chu Ji Choi, Min Kyoung Jo, Eunseon Jeon, and Youn Sang Kim. Division of Nano Sciences and Department of Chemistry, Ewha Womans University, 11-1 Daehyun-dong, Seodaemun-gu, Seoul, 120-750, South Korea
We demonstrate a new strategy to achieve an anti-adhesion surface for the simple fabrication of nanostructures with high fidelity which is applicable to all types of molds. In unconventional lithography, the adhesion release is affected by various effects such as surface energy, storage and loss moduli, etc. Although perfluoro-groups have the lowest surface energy, the adhesion energy, represented by peel fracture energy, of an intrinsic PDMS surface is lower than that of a surface treated with perfluoro-groups. Here in, we present the novel surface treatment of various hard and soft molds with PDMS, which has good surface properties for the molding like normal PDMS mold. Also, we introduce a simple fabrication route to highly transparent super-hydrophobic surface with a PDMS-coated flexible mold.

Joint PMSE/POLY Poster Session
6:00 PM-8:00 PM, Tuesday, August 21, 2007 BCEC -- Exhibit Hall - B2, Poster

8:00 PM-10:00 PM, Monday, August 20, 2007 BCEC -- Exhibit Hall - B2, Sci-Mix

Division of Polymeric Materials: Science & Engineering

The 234th ACS National Meeting, Boston, MA, August 19-23, 2007