INOR 476 |
| A miniature thin-film solid electrolyte oxygen sensor (sensing area: 1.0 mm x 1.1 mm) with a simple and robust design has been developed. Semiconductor microfabrication techniques were used in the sensor fabrication. Preliminary testing was conducted in an amperometric mode at temperatures up to 600ºC. Sensor response was linear with respect to the log of the O2 concentration from 0.5% to 16%, with the potential to detect O2 at much lower concentrations. The O2 sensor has the advantage of small size, wide detection range, fast response, simple batch fabrication, and low power consumption. The resulting miniature O2 sensor can be integrated into a sensor array with other sensors and electronics, power, and telemetry on a stamp sized package, used as “lick and stick” for aerospace applications such as fire detection, fuel leak detection, and environmental monitoring. |
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Electrochemistry
2:00 PM-5:00 PM, Monday, 11 September 2006 Moscone Center -- Room 307, Oral
Division of Inorganic Chemistry |