Novel silicon elastomers for advanced soft lithography

PMSE 291

Kyung M. Choi, Room 1C-352, Bell Laboratories, Lucent Technologies, 600-700 Mountain Avenue, Murray Hill, NJ 07974
Industry has sought for novel polymers for applied nanotechnology to satisfy our diverse demands in miniaturization. Soft lithography has attracted much interest for micro- or nano-fabrication as an alternative to conventional UV photolithography. Since there are limitations of this technology for developing high resolution pattern transfers, especially in the nano-scale regime, we designed and synthesized a new family of photocurable PDMS polymers to be used as photopatternable silicon elastomers to achieve advanced soft lithography.
 

Joint PMSE/POLY Poster Session
6:00 PM-8:00 PM, Tuesday, 12 September 2006 Moscone Center -- Hall D, Poster

Sci-Mix
8:00 PM-10:00 PM, Monday, 11 September 2006 Moscone Center -- Hall D, Sci-Mix

Division of Polymeric Materials: Science & Engineering

The 232nd ACS National Meeting, San Francisco, CA, September 10-14, 2006