ANYL 17 |
| X-ray fluorescence is a particularly versatile tool as it can be used to examine the composition of materials, yet can also be used for measuring the thickness of very thin metallic coatings. Main features of FP-MULTI (Fundamental Parameters-Multi-layers), a software for analyzing composition and thickness of multi-layer samples simultaneously using XRF, are briefly described in this paper. Based on fundamental parameter method, the software has the capability of determining multi-layer samples containing up to 10 layers and 25 elements. Calibration standards can be bulk or multi-layer of pure element or multi-element standards. FP-MULTI is used to predict the relationship between in tensities of different X-ray lines and the thickness first and then to analyze those samples. When using only few calibration standards, the results from FP-MULTI are much better than those from linear regression method, and this reflects the advantages of the fundamental parameter approach. The combination of materials analysis and coating thickness measurement into a single spectrometer is a vital development for scientists and engineers involved in analysing complex structures. The perfection of fundamental parameter analysis software and the addition of solid-state detection devices has enabled the examination of alloy and multi-layer coatings. Electronic component manufacture and jewellery, two industries that have offered the most challenging scenarios to date, have both found that the innovative software and hardware offers an unparalleled solution. |
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General Papers
8:30 AM-11:35 AM, Sunday, 28 August 2005 Washington DC Convention Center -- 155, Oral
Sci-Mix
Division of Analytical Chemistry |