Session: Friction, Lubrication, and Adhesion in Micro- and Nano-Scale Devices


COLL		Monday, March 29, 2004

2:00 PM-5:20 PM Marriott -- Orange County 5, Oral
Friction, Lubrication, and Adhesion in Micro- and Nano-Scale Devices
Tribology of MEMS and Small Devices
Organizer:	Scott S. Perry
Organizer, Presiding:	C. Mathew Mate
2:00 PM	156	Electrostatics and tribocharging George M. Whitesides, A. Winkleman, L. McCarty, B. Gryzbowski, E. Tran
2:30 PM	157	Surface chemistry and tribology of MEMS Roya Maboudian
3:00 PM		Intermission
3:10 PM	158	Anti-wear properties of ultrananocrystalline diamond (UNCD) films for MEMS Hyun I. Kim, Stephen V. Didziulis, Paul D. Fleischauer, James Birrell, John A. Carlisle, Orlando Auciello
3:30 PM	159	Gas-phase anti-stiction and lubrication process for MEMS devices Seong H. Kim, K. Strawhecker
4:00 PM		Intermission
4:10 PM	160	Effects of processing and storage conditions on the tribological behavior of monolayer lubricants for MEMS Michael T. Dugger, Joshua S. Wiehn, Diane E. Peebles
4:30 PM	161	Lubrication of MEMS by ionic liquids Jeffrey S. Zabinski, K. C. Eapen, Benjamin S. Phillips, Robert A. Mantz, Jose J Nainaparampil
4:50 PM	162	Connecting atomic and nano-scale properties with MEMS performance Robert W. Carpick, Anirudha V. Sumant, Erin E. Flater, David S. Grierson, Michael E. Plesha, Can K. Bora, John A. Carlisle, Orlando Auciello, Maarten P. de Boer, Alex D. Corwin, Jennifer Gerbi

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