COLL 171 |
| Juchao Yan1, G.V. Rama Rao2, Marcos Barela2, Dmitri A. Brevnov2, Ying-Bing Jiang3, Huifang Xu3, Gabriel P Lopez2, and Plamen Atanassov2. (1) Department of Physical Sciences, Eastern New Mexico University, 1500 S Ave K, Portales, NM 88130, (2) Department of Chemical and Nuclear Engineering, The University of New Mexico, 203, Farris Engineering Building, Albuquerque, NM 87131, (3) Transmission Electron Microscopy Laboratory, The University of New Mexico, Department of Earth and Planetary Sciences, The University of New Mexico, Albuquerque, NM 87131 |
| Nanoporous anodic aluminum oxide (AAO) is a fragile, hexagonal array of straight cylindrical pores with tunable features. Patterned AAO with ordered nanopores at specially defined areas enables its integration into established microfabrication processes. The selective growth of AAO from patterns of controlled size and shape can be achieved through anodization of pre-patterned aluminum surface (i.e., patterned anodization). Nanoindentation and polymer deposition have been used to pre-pattern aluminum surface. Both are not considered practical because nanoindentation fails to pattern large-area surfaces on delicate substrates and polymer deposition results in partial anodization of the underlying aluminum. This paper describes our patterned anodization for the aluminum surfaces (both bulk sheets and evaporated films) that have been pre-patterned with an anodization barrier of silica through a sol-gel process or a dielectric evaporation. Using a two-step anodization process, we fabricated ordered, uniform and straight nanopores in the unpatterned areas, and did not observe any pores in the patterned areas before and after silica was removed. This approach provides intermittent aluminum supports to fragile AAO, allowing facile incorporation of AAO in a robust form into microdevices for microelectronics, microfluidics and integrated optics.
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Nanoscience and Nanotechnology
2:00 PM-5:15 PM, Monday, March 29, 2004 Marriott -- Grand Ballroom J, Oral
Division of Colloid and Surface Chemistry |