COLL 66 |
| Tom Dickinson, Forrest Stevens, Ann McEvoy, and Stephen Langford. Department of Physics, Washington State University, Pullman, WA 99164-2814 |
| We present results of fundamental studies of the simultaneous application of chemical agents and mechanical stress applied between a model single asperity and a solid surface. We show the consequences of combining highly localized mechanical stress (due to contact with an atomic force microscope--AFM tip) and exposure to aqueous solutions. The experiment simulates many features of a single particle-substrate-slurry interaction in CMP. In particular we show quantitative, correlated data on the wear occurring on both surfaces. We examine surfaces of inorganic single crystals, glasses, and silicon nitride. We also present results on tip induced recrystallization (at small normal forces) and unique patterning produced by scanning in super-saturated aqueous solutions. Finally, studies of exposing polymer surfaces to stress and organic solvents will be discussed. Models are presented to explain these observed nanometer scale surface modifications. |
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Friction, Lubrication, and Adhesion in Micro- and Nano-Scale Devices
2:00 PM-5:00 PM, Sunday, March 28, 2004 Marriott -- Orange County 5, Oral
Division of Colloid and Surface Chemistry |