Single-walled carbon nanotubes (SWNTs) have attracted much attention as the essential components for fabricating nanoelectronic devices. Highly organization of SWNTs perpendicular to the substrates has been accomplished by using metal-coordination reactions between chemical groups on the open ends of shortened SWNTs and chemically functionalized surfaces. The tapping mode atomic force microscopy and polarized Raman spectroscopy have been used to characterize the vertical alignments of the SWNTs on the substrates. For controlling the high selectivity of a specific chemical reaction, we have prepared a pre-patterned 3D nanostructure by using AFM anodization lithography and achieved the vertical alignment of SWNTs specifically on patterend area. Detailed procedures for the preparation of the chemically modified SWNTs and their vertical arrays on the functionalized substrates will be discussed.

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