COLL 158 |
| Hyun I. Kim1, Stephen V. Didziulis1, Paul D. Fleischauer1, James Birrell2, John A. Carlisle3, and Orlando Auciello3. (1) Space Materials Laboratory, The Aerospace Corporation, 2350 E. El Segundo Blvd., El Segundo, CA 90245, (2) Materials Science Division, Argonne National Laboratories, 9700 South Cass Ave., Argonne, IL 60439, (3) Materials Science Division, Argonne National Laboratory, 9700 S. Cass Ave, Argonne, IL 60439 |
| Protecting moving mechanisms of MEMS against friction, wear, and stiction that limit the performance and sustainable reliability poses a significant challenge in realizing the full potentials of MEMS applications. Numerous anti-stiction and anti-wear coatings have been developed to help mitigate such issues with limited successes in recent years. One area of great concern is the environmental effect; Extreme environments such as high vacuum or high humidity are typically harsh for tribological interfaces. Here we will present the wear properties of ultrananocrystalline diamond (UNCD) films under various environments, including ambient air, N2, UHV as well as a range of humidity. Using UHV tribometry, XPS and AES, we will discuss the chemical and physical characterization of the wear properties. |
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Friction, Lubrication, and Adhesion in Micro- and Nano-Scale Devices
2:00 PM-5:20 PM, Monday, March 29, 2004 Marriott -- Orange County 5, Oral
Division of Colloid and Surface Chemistry |