COLL 159 |
| Seong H. Kim, Department of Chemical Engineering, The Pennsylvania State University, 118B Fenske Laboratory, University Park, PA 16802 and K. Strawhecker, Department of Chemical Engineering, Pennsylvania State University, University Park, PA 16802. |
| To realize the full potential of (MEMS) devices, stiction, friction and wear in these devices must be minimized. These are key challenges to MEMS technology, limiting device realization and reliability. This work reports the use of the adsorption equilibrium of gas-phase molecules for continuous formation of liquid films on the working device surface for lubrication and anti-stiction. Upon adsorption on substrate surfaces, these molecules form a nanoscale lubrication and anti-stiction film, without unwanted power dissapation caused by the presence of bulk liquid. The gas-phase lubrication approach has the same physical nature of the well-known water condensation on MEMS devices. The data discussed here indicate that molecular level control of the chemical nature of the condensed liquid film will be an excellet solution for anti-stiction, effective lubrication, and anti-wear operation of MEMS devices for a prolonged period of time. |
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Friction, Lubrication, and Adhesion in Micro- and Nano-Scale Devices
2:00 PM-5:20 PM, Monday, March 29, 2004 Marriott -- Orange County 5, Oral
Division of Colloid and Surface Chemistry |