Scanning probe nanolithography and nanochemistry

COLL 289

Daan Wouters and Ulrich S. Schubert. Macromolecular Chemistry and Nanoscience, Eindhoven University of Technology, P.O. Box 513, Eindhoven, 5600 MB, Netherlands
In nanotechnology, the ability to pattern and functionalize surfaces with nanometer resolution is a main target within current research programs. To develop novel data storage applications or functional nano-devices (e.g. sensors), researchers are using methods from the bottom-up as well from the top-down approach. Here we report on a combination of local probe oxidation and self-assembly as a tool for the construction of complex nanometer-sized devices. This technique has proven to be capable of patterning a large number of metallic and semi-conducting substrates but also organic resists at sub-20 nm resolution. Besides the formation of patterns, the oxidation of organic resists also creates local chemical functionality. Thus creating a site-specific template for subsequent chemical modification and self-assembly reactions. Presented are results of the (sequential) functionalization of surfaces with for example nanoparticles, ammonium salts and functional silanes. By subsequent modification reactions (e.g. polymerization or proteins adsorption) complex functional nano-structured ‘devices’ were constructed.

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