COLL 9 |
| Andrew V. Teplyakov, Department of Chemistry and Biochemistry, Department of Chemistry and Biochemistry, University of Delaware, Newark, DE 19716 |
| A combination of infrared spectroscopy, thermal desorption mass spectrometry and atomic force microscopy was used to analyze the fundamental phenomena leading to the formation of multilayer (sandwich) structures on silicon substrates. For example, smooth and continuous TiCN films were easily deposited from tetrakis-(dimethylamino)-titanium (TDMAT) on a clean Si(100)-2x1 surface at slightly elevated temperatures and pressures of 2 microtorr and even lower. The chemistry leading to this deposition will be discussed. The unusual application of MIR-FTIR to study multilayered structures was successfully performed for TiCN, Al, and Cu deposition onto a TiCN-precovered Si(100). Interestingly, not only surface chemistry of the CVD precursors on TiCN, but also all the chemical transformations at all the interfaces created in the process of deposition can be followed by such an approach. Hydrogen diffusion, precursor molecule orientation and chemistry and the effect of these phenomena on the formation of the multilayered systems will be described. |
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Vibrational Analyses of Dry and Wet Surfaces
9:00 AM-11:30 AM, Sunday, March 28, 2004 Marriott -- Grand Ballroom H, Oral
Division of Colloid and Surface Chemistry |