COLL 446 |
| Graham J Leggett, Karen S L Chong, and Shuqing Sun. Department of Chemistry, University of Sheffield, Brook Hill, Sheffield S10 3PT, United Kingdom |
| Scanning near-field photolithography (SNP) is a new lithographic tool in which a scanning near-field optical microscope (SNOM) coupled to a UV laser is used as a light source to photopattern self-assembled monolayers (SAMs) with a resolution rivalling electron beam lithography. Using SNP we have written features with linewidths as small as 20 nm into SAMs of alkanethiols on gold surfaces (ie less than the diameter of the SNOM aperture). SAMs patterned using SNP have been used as templates for the fabrication of more complex architectures, based upon nanopatterned nanoparticles and proteins. They may also be used as resists to etch three-dimensional features into metallic substrates. SNP is not confined to the patterning of alkanethiol monolayers, but extends to any system in which specific photochemistry may be excited in a monolayer. Hydrogen-passivated silicon surfaces may be selectively derivatised with alkenes in a fluid-phase reaction, suggesting SNP provides a versatile reactive nanolithography. |
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Nanoscience and Nanotechnology
2:00 PM-5:15 PM, Wednesday, March 31, 2004 Marriott -- Orange County 5, Oral
Division of Colloid and Surface Chemistry |