COLL 162 |
| Robert W. Carpick1, Anirudha V. Sumant1, Erin E. Flater1, David S. Grierson1, Michael E. Plesha1, Can K. Bora1, John A. Carlisle2, Orlando Auciello2, Maarten P. de Boer3, Alex D. Corwin3, and Jennifer Gerbi2. (1) Engineering Physics, University of Wisconsin - Madison, 1500 Engineering Dr, 543 ERB, Madison, WI 53704, (2) Materials Science Division, Argonne National Laboratory, 9700 S. Cass Ave, Argonne, IL 60439, (3) Reliability Physics Dept. 1762, Sandia National Laboratories, MS 1081, Albuquerque, NM 87185 |
| The design of reliable MEMS and NEMS devices requires a predictive capability for friction and wear. We describe two thrusts aimed at understanding and mitigating these issues. First, we have undertaken efforts to predict friction in MEMS by connecting single asperity measurements via AFM with multi-asperity measurements in silicon-based MEMS friction test devices through the use of models of contact between rough surfaces. This allows us to identify and control contributions to friction and damage due to surface topography and surface chemistry. Second, we investigate the use of ultrananocrystalline diamond for MEMS and NEMS. This thin film material, as hard and stiff as single crystal diamond, can have low friction and adhesion with appropriate surface treatments. We discuss how to tailor the morphology and chemistry of the underside of the film so that, when in contact with an opposing sliding surface, its tribological properties will be optimized. |
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Friction, Lubrication, and Adhesion in Micro- and Nano-Scale Devices
2:00 PM-5:20 PM, Monday, March 29, 2004 Marriott -- Orange County 5, Oral
Division of Colloid and Surface Chemistry |