IEC 159 |
| L. Rhys Lawson and Larry Dalton. Department of Chemistry and Nanotechnology, University of Washington, Box 351700, Seattle, WA 98195 |
| In micromolding and imprint lithography, stiction is a highly detrimental phenomenon that causes incomplete stampings, as well as defects generated during the separation of stamp and film. These are the results of strong adhesion between a deposited film and the stamp material. The problem of stiction is addressed in this report through a complete dissolution of the stamp material, instead of the traditional, mechanical, separation. The method reported details the fabrication of polymeric stamps from materials tailored to dissolve in a solvent which leaves the imprinted film unaffected. A variety of stamp materials will be discussed, including those soluble in water, alcohols, as well as non-polar organic solvents. Micromolding and embossing applications will be demonstrated as well as the mask-less stamping and development of SU-8, negative-tone photoresist films. |
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General Poster Session
5:00 PM-7:00 PM, Tuesday, March 25, 2003 Convention Center -- Hall G, Poster
Sci-Mix
Division of Industrial and Engineering Chemistry |